|
S. Saxena (1993): Fault Isolation during Semiconductor Manufacturing using Automayic Discovery from Wafer Tracking Databases
Title: |
Fault Isolation during Semiconductor Manufacturing using Automayic Discovery from Wafer Tracking Databases |
Author(s): |
S. Saxena |
Year: |
1993 |
Booktitle: |
KDD-93: Workshop on Knowledge Discovery in Databases |
Editor(s): |
G. Piatetsky-Shapiro |
Concepts
|
|